한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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- Pages.146-149
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- 1996
Tetramethyldisiloxane 플라즈마 중합막의 광학특성
The Optical Properties of Tetramethyldisiloxane Plasma Polymerization Thin Films
- Choi, Chung-Seog (Dept. of Elec. Eng., Inha Univ.) ;
- Park, Bok-Kee (Dept. of Elec. Eng., Chonbuk Sanup Univ.) ;
- Kim, Doo-Seog (Dept. of Elec. Eng., Chonbuk Sanup Univ.) ;
- Lee, Jin (Dept. of Elec. Eng., Mokpo Univ.) ;
- Lee, Duck-Chool (Dept. of Elec. Eng., Inha Univ.)
- 발행 : 1996.05.01
초록
Polymerization rate, transmittance, refractive index, and extinction coefficient of plasma polymerized tetramethydisiloxane (TMD) have been investigated. The rate of polymerization of TMD films increased nonlinearly with the discharge lower. The refractive indices of thin films varied from 1.40 to 1.43 and they also increased with increasing discharge power. Also, the extinction coefficient was about 0.2 and is independent of photon energy.
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