한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1996년도 춘계학술대회 논문집
- /
- Pages.1.1-5
- /
- 1996
제작 온도에 따른 Se박막의 구조적 특성에 관한 연구
A study on structural characteristics of Se thin film by fabrication temperature
초록
Structural characteristics in Se thin film fabricated by EBE method had been studied. Se thin film was deposited with noncrystalline until substrate temperature of 100
키워드