Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1996.05a
- /
- Pages.129-132
- /
- 1996
Study on YBCO Surface Modification by Laser Beam
레이저 빔에 의한 YBCO 표면변조 연구
Abstract
Surface modification like cone formation on Pulsed laser deposition (PLD) occurs in YBCO target surface irradiated by laser beam. Cone formation results in a reduction of deposition rate, so that it is significant obstacles to an efficient deposition process. With the change of various conditions such as the number of laser shot, target density, direction of incoming laser beam, we have systematically analyzed the modification of target surface. Because cones formed by beam-target interactions grow in direction of incoming laser beam, we have used the method of rotating the target position by 180
Keywords