한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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- Pages.288-291
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- 1996
TiW막의 식각특성 연구
A Study on the Etching Properties of TiW Films
초록
The surface properties after plasma etching of TiW solutions using the chemistries of BCl
키워드