Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.06a
- /
- Pages.149-149
- /
- 1996
Developpment and Approbation of HF Technological Ion Source for Inert and Chemically Reactive Gases
- Kralkina, E.A. (RIAME MAI) ;
- Kondranin, S.G. (RIAME MAI) ;
- Alexandrov, A.F. (RIAME MAI) ;
- Bougrov, G.E. (RIAME MAI) ;
- Vorovjev, N.F. (RIAME MAI) ;
- Rukhadze, A.A. (RIAME MAI)
- Published : 1996.06.01
Abstract
Keywords