한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1996년도 제11회 학술발표회 논문개요집
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- Pages.149-149
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- 1996
Developpment and Approbation of HF Technological Ion Source for Inert and Chemically Reactive Gases
- Kralkina, E.A. (RIAME MAI) ;
- Kondranin, S.G. (RIAME MAI) ;
- Alexandrov, A.F. (RIAME MAI) ;
- Bougrov, G.E. (RIAME MAI) ;
- Vorovjev, N.F. (RIAME MAI) ;
- Rukhadze, A.A. (RIAME MAI)
- 발행 : 1996.06.01