Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.06a
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- Pages.92-92
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- 1996
A Study on SSIC(seed selection through ion channeling) Processings of LPCVD Polycrystaline Silicon Films
LPCVD 다결정 실리콘 박막의 SSIC(seed selection through ion channeling) 공정에 관한 연구
Abstract
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