한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1996년도 제11회 학술발표회 논문개요집
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- Pages.74-74
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- 1996
Cu films by partially ionized beam deposition for furture ULSI metallization
- Kim, Ki-Hwan (Department of Ceramics, Yonsei university) ;
- Choi, Doo-Jin (Department of Ceramics, Yonsei university) ;
- Han, Sung (Division of Ceramics, Korea Institute of Science and Technology) ;
- Jang, Hong-Gui (Division of Ceramics, Korea Institute of Science and Technology) ;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute of Science and Technology)
- 발행 : 1996.06.01