Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Electrical property of Coper Film by PIBD(Partially Ionized Beam Deposition)

  • Sung Han (Deppartment of Ceramic Engineering, Yonsei University) ;
  • KiH (Division of Ceramics, Korea Institute of Science and Technology)
  • Published : 1996.06.01
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