Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.06a
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- Pages.31-31
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- 1996
Heteroepitaxial Growth of Silicon Carbide Thin Films by High Vacuum Chemical Vapor Deposition Using the Single precursor 1,3-Disilabutane
- Kim, Yunsoo (Thin Film Materials Laboratory Inorganic Materials Division Korea Research Institute of Chemical Technology)
- Published : 1996.06.01
Abstract
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