산소 이온 빔에 의한 실리콘 산화 과정의 in-situ MEIS 분석

• Kim, Yeong-Pil (Dept. of Materials Engineering, Korea Advanced Institute of Science and Technology) ;
• Choe, Si-Gyeong (Dept. of Materials Engineering, Korea Advanced Institute of Science and Technology) ;
• Ha, Yong-Ho (Korea Advanced Institute of Science and Technology) ;
• Kim, Se-Hun (Korea Advanced Institute of Science and Technology) ;
• Kim, Hyeon-Gyeong (Korea Reserch Institute of Standards and Science)

• 김영필 (한국과학기술원 재료공학과) ;
• 최시경 (한국과학기술원 재료공학과) ;
• 하용호 (한국과학기술원 화학과) ;
• 김세훈 (한국과학기술원 화학과) ;
• 김현경 (한국표준과학연구원 표면분석그룹)

• Published : 1996.02.01

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