한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1996년도 제10회 학술발표회 논문개요집
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- Pages.135-135
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- 1996
Surface Structure of TiN Films by Ion Beam Processing
- Min, Kyung-youl (Surface and Interface Division, National Research Insititute for Metals, Tsukuba) ;
- KazuhiroYoshihara (Surface and Interface Division, National Research Insititute for Metals, Tsukuba) ;
- RyuichiShimizu (Department of Applied Physics, Osaka University)
- 발행 : 1996.02.01