Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.135-135
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- 1996
Surface Structure of TiN Films by Ion Beam Processing
- Min, Kyung-youl (Surface and Interface Division, National Research Insititute for Metals, Tsukuba) ;
- KazuhiroYoshihara (Surface and Interface Division, National Research Insititute for Metals, Tsukuba) ;
- RyuichiShimizu (Department of Applied Physics, Osaka University)
- Published : 1996.02.01
Abstract
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