STM Analysis of Site Selectivity in the Initial Oxidation of Si

  • Ha, Jeong Sook (Research Deppartment, Electronics and Telecommunications Research Institute) ;
  • Park, Kang-Ho (Research Deppartment, Electronics and Telecommunications Research Institute) ;
  • Park, Seong (Deppartment of Materials Science and Engineering, Kwangju Institute of Science and Technology)
  • 발행 : 1996.02.01