Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.02a
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- Pages.69-69
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- 1996
Properties of $Y_2O_3$ Thin Films Prepared by RICBD Method
RICBD 법에 의한 $Y_2O_3$ 박막특성에 관한 연구
- Published : 1996.02.01
Abstract
Keywords