대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
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- Pages.1982-1984
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- 1996
Pt/Cr 이중층을 이용한 미세 발열체의 제작과 발열특성
A thermal properties of micro hot-plate fabricated by using the Pt/Cr bilayer
- Yi, Seung-Hwan (MANDO R & D Center) ;
- Suh, Im-Choon (MANDO R & D Center) ;
- Sung, Yong-Kwon (Dept. of Elec. Eng., Korea Univ.)
- 발행 : 1996.07.22
초록
In this paper, we have evaluated the physical characteristicsof the Pt/Cr bilayer, fabricated the micro hot plate by using the Pt/Cr bilayer and E-beam evaporated oxide as a passivation layer, and simulated the thermal distribution by using the commercial software FIDAP. From the researches the sheet resistance of Pt/Cr bilayer didn't be affected by the Cr layer thickness. This results was considered due to the Cr-oxide resided at the interface between Pt and Cr layer. After manufacturing the hot plate, we measured its temperature by type k thermo-couple and I.R. thermo-vision system. In those experiments, the emission coefficient(
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