A thermal properties of micro hot-plate fabricated by using the Pt/Cr bilayer

Pt/Cr 이중층을 이용한 미세 발열체의 제작과 발열특성

In this paper, we have evaluated the physical characteristicsof the Pt/Cr bilayer, fabricated the micro hot plate by using the Pt/Cr bilayer and E-beam evaporated oxide as a passivation layer, and simulated the thermal distribution by using the commercial software FIDAP. From the researches the sheet resistance of Pt/Cr bilayer didn't be affected by the Cr layer thickness. This results was considered due to the Cr-oxide resided at the interface between Pt and Cr layer. After manufacturing the hot plate, we measured its temperature by type k thermo-couple and I.R. thermo-vision system. In those experiments, the emission coefficient( ${\varepsilon}$ ) of the E-beam evaporated oxide was 0.5 and the temperature of centural region was reached about $305\;^{\circ}C$ at 1.3 watts. The temperature simulation obtained by FIDAP commercial package stewed that the temperature of centural region was about $311\;^{\circ}C$ after 5 sec.