Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Silicon Micromachined Fluidic Amplifier and Performance Analysis with Computational Fluid Dynamics

실리콘 마이크로머시닝을 이용한 유체증폭기의 제작과 수치해석을 이용한 해석

  • Kim, Tae-Hyun (Seoul National University, School of Electrical Engineering) ;
  • Cho, Dong-Il (Seoul National University, School of Electrical Engineering)
  • 김태현 (서울대학교 공과대학 전기공학부) ;
  • 조동일 (서울대학교 공과대학 전기공학부)
  • Published : 1996.07.22
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Abstract

This paper describes the analysis, design, and silicon-fabrication of a fluidic proportional amplifier, which is the most important element of fluidic logic circuits. First, FEM(finite element method) analyses were performed, using the Fluent computational fluid dynamics program, and design geometries were optimized. Then, a $40\;{\mu}m$-deep amplifier was fabricated in silicon using anisotropic dry etching.

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