대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
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- Pages.1960-1962
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- 1996
열공압형 마이크로 펌프의 제작에 관한 연구
A Study on the Fabrication of a Thremopneumatic micropump
- Kim, Y.S. (School of Electrical and Electronics Engineering Ajou Univ.) ;
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Yang, S.S.
(School of Electrical and Electronics Engineering Ajou Univ.)
- 발행 : 1996.07.22
초록
A thermopneumatic micropump with two micronozzles has been fabricated and tested. The actuator consists of a p+ diaphragm and a pyrex glass on which a microheater is deposited. Two micronozzles are fabricated on either side of a single silicon wafer and behave as a dynamic passive valves. The actuator and the micronozzle are assembled to make a micropump. The center deflection of the actuator diaphragm to step voltage input has been measured. The dynamic test hag been performed by measuring the center deflection of the diaphragm under various input voltages and duty ratios. Also dynamic pumping test is performed. The measured built-up pressure between inlet and outlet of the micropump is 80 Pa for the actuation at 20V, 10 Hz.
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