대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

마이크로 미러의 광학적 특성 측정

Measurement of Optical Properties of Micromirror

  • Kim, Do-Hyeong (Department of Electrical Engineering, Chung-ang University) ;
  • Kim, Ho-Seong (Department of Electrical Engineering, Chung-ang University)
  • 발행 : 1996.07.22
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초록

In this paper, we measured the reflectance of the $100{\mu}m{\times}100{\mu}m$ micromirror. In order to reduce the size of the HeNe laser beam, an eyepiece and an objective lens were used. CCD camera was used to the monitor the position and focusing. It was found that the diameter of the focused laser beam was about $3{\mu}m$. The reflectance of the reflectance of the micromirror was over the surface and 87% of the commercial mirror.

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