대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
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- Pages.1735-1737
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- 1996
광학적 방법을 이용한 마이크로 구조물의 편평도 측정
Flatness Measurement of Microstructures using an Optical Method
- Min, Sung-Wook (School of Electrical Engineering, Seoul National University) ;
- Jung, Jae-Hoon (School of Electrical Engineering, Seoul National University) ;
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Song, Min-Ho
(School of Electrical Engineering, Seoul National University)
;
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Lee, Byoung-Ho
(School of Electrical Engineering, Seoul National University)
- 발행 : 1996.07.22
초록
Using a modified Michelson interferometer configuration, the flatness of micro mirror cell surface was probed. Interferograms were captured at CCD camera plane by defocusing object beam onto the micro mirror with microscope objective lens. And these were compared with the interferograms made with the flat metallic mirror. Also, the theoretical analysis is presented.
키워드