Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Flatness Measurement of Microstructures using an Optical Method

광학적 방법을 이용한 마이크로 구조물의 편평도 측정

  • Min, Sung-Wook (School of Electrical Engineering, Seoul National University) ;
  • Jung, Jae-Hoon (School of Electrical Engineering, Seoul National University) ;
  • Song, Min-Ho (School of Electrical Engineering, Seoul National University) ;
  • Lee, Byoung-Ho (School of Electrical Engineering, Seoul National University)
  • Published : 1996.07.22
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Abstract

Using a modified Michelson interferometer configuration, the flatness of micro mirror cell surface was probed. Interferograms were captured at CCD camera plane by defocusing object beam onto the micro mirror with microscope objective lens. And these were compared with the interferograms made with the flat metallic mirror. Also, the theoretical analysis is presented.

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