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Thin-Film Strain-Gage Pressure Sensors

This paper describes the recent development of a thin-film pressure transducer with Cu-Ni films as strain gages. The construction details and the output characteristics are presented. In order to improve the sensitivity and the temperature compensation, two circumferential gages are placed in the central region of the diaphragm, and two radial gages are placed near the edge. The output sensitivity obtained is 2.1mV/V and the maximum non-linearity and hysteresis is less than 2%FS.