대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
- /
- Pages.1476-1478
- /
- 1996
박막 스트레인 게이지를 이용한 압력 센서
Thin-Film Strain-Gage Pressure Sensors
- Min, N.K. (Korea University) ;
- Chin, M.S. (Korea University) ;
- Chun, J.H. (Korea University) ;
- Seo, S.Y. (Dae Sung Electric Co., Ltd.)
- 발행 : 1996.07.22
초록
This paper describes the recent development of a thin-film pressure transducer with Cu-Ni films as strain gages. The construction details and the output characteristics are presented. In order to improve the sensitivity and the temperature compensation, two circumferential gages are placed in the central region of the diaphragm, and two radial gages are placed near the edge. The output sensitivity obtained is 2.1mV/V and the maximum non-linearity and hysteresis is less than 2%FS.
키워드