대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
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- Pages.1446-1449
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- 1996
Magnetron PECVD에 의한 DLC 박막의 제작에 관한 연구
A study on the deposition of DLC films by magnetron PECVD
- Kim, Soung-Young (Korea Academy of Industrial Technology) ;
- Lee, Jai-Sung (Dept. of Metallurgy & Materials Science, Hanyang University) ;
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Park, Jin-Seok
(Dept. of Electrical Engineering, Hanyang University)
- 발행 : 1996.07.22
초록
Thin films of diamond-like carbon(DLC) have been deposited using a magnetron plasma-enhanced chemical vapor deposition(PECVD) method with an rf(13.56 MHz) plasma of
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