Microstructure of Solid Phase Crystallized Amorphous $Si/Si_{0.69}Ge_{0.31}$ and $Si_{0.69}Ge_{0.31}/Si$ Bilayer
고상결정화된 비정질 $Si/Si_{0.69}Ge_{0.31}$ 과 $Si_{0.69}Ge_{0.31}/Si$ 이층박막의 미세구조
- Kim, Tae-Hoon (Seoul National University, Metallurgical Engineering) ;
- Kim, Ki-Bum (Seoul National University, Metallurgical Engineering) ;
- Kim, Chang-Soo (Korea Research Institute of Standards Science, Materials Evaluation Center)
- Published : 1995.12.01
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