A Study on the Characteristics of High Pressure DC Glow Discharge with a Narrow Gap

좁은 간격의 고압 DC 글로우 방전에서의 방전물성에 관한 연구

  • Park, Jae-Seong (Dep. of Electrical Engineering, Seoul National University) ;
  • Jeong, Heui-Seob (Dep. of Electrical Engineering, Seoul National University) ;
  • Shin, Buhm-Jae (Dep. of Electrical Engineering, Seoul National University) ;
  • Whang, Ki-Woong (Dep. of Electrical Engineering, Seoul National University)
  • Published : 1995.11.18

Abstract

It is important to understand tile behaviours of tile high pressure DC glow discharge with a micro gap inside a pixel of the plasmas display panel. We prepared a narrow gap discharge system and have measured electron temperature and density by means of double probe methods in high pressure which was between 100torr and 200torr. And the electrode gap was 7mm. When the pressure varied from 100torr to 200torr, the negative glow was created at a distance less than 1mm from the cathode. And the length of the faraday dark space decreased from 8mm to 5mm. Hence probe measurements was mainly, performed in the region of the Faraday dark space. The dependence of electron temperature and density on the pressure and current density was same with that of the general flow discharge, i.e. as the pressure increased the electron temperature decreased and the density increased. But the spatial electron density distribution in the Faraday dark space was highly distorted because of the effect of high pressure.

Keywords