Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1995.11a
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- Pages.386-388
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- 1995
Determination of Optical Constant of Tetramethylsilane Films Plasma Polymerized
플라즈마 중합된 TMS 박막의 광학상수 결정
- Choi, C.S. (Inha Univ.) ;
-
Park, B.K.
(Chonbuk Sanup Univ.)
;
- Kim, Y.B. (Inha Junior Col.) ;
- Lee, D.C. (Inha Univ.)
- Published : 1995.11.18
Abstract
The polymerization rate, chemical structure and optical properties of tetramethyldisiloxane(TMS) have been investigated. The rate of polymerization of TMS films increased nonlinearly with the discharge power. The refractive indices of thin films varied from 1.40 to 1.43 and they also increased with increasing discharge power. Also, the extinction coefficient was about 0.2 and is independent of photon energy.
Keywords