레이저 증착법을 이용한 금속기판상 고온초전도 박막증착 및 특성분석

Fabrication and Characterization of High Temperature Superconducting Thin Film on Metallic Substrate Using Laser Ablation

Laser ablation was used to fabricate superconducting $YBa_2Cu_3O_{7-x}$ (YBCO) thin films on metallic substrates with an YSZ buffer layer. An ArF excimer laser with an wavelength of 193 nm was used to deposit both YSZ buffer layer and superconducting thin film. The characterizations of thin films were performed and compared. With a 200 nm YSZ buffer layer, c-axis orientation and $T_c$=85 K were obtained for a 200 nm-thick YBCO film.