대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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- Pages.323-325
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- 1995
자화된 유도 결합형 플라즈마를 이용한 다이아몬드성 탄소박막 증착
Diamond-Like Carbon Films Prepared by Magnetized Inductively Coupled Plasma
- Kim, Joong-Kyun (Dep. of Electrical Engineering, Seoul National Univ.) ;
- Lee, Ho-Jun (Dep. of Electrical Engineering, Seoul National Univ.) ;
- Whang, Ki-Woong (Dep. of Electrical Engineering, Seoul National Univ.)
- 발행 : 1995.11.18
초록
An Inductively Coupled Plasma(ICP) was employed to prepare the Diamond-Like Carbon film with
키워드