Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1995.11a
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- Pages.5.1-11
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- 1995
Electron Swam Study -An Effective Approach to Electron Approach to Electron-Atom/Molecule Collision Study-
- Na, Y.kamura (Faculty of Science and Technology, Keio University)
- Published : 1995.11.01
Abstract
Electron swarm studies to derive electron collision cross sections of atoms and molecules from measurements of electron swarm data are reviewed. Stress is placed on those using molecular gas-rare gas mixtures.
Keywords