Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Hygroscopic Characteristics of TiO$_2$Thin Films Deposited by R.F Sputter

R.F 스퍼트링에 의한 TiO$_2$박막의 감습특성

  • Published : 1995.11.01
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Abstract

TiO$_2$thin films for humidity sensors have been deposited by RF magnetron sputter and hygroscopic characteristics were investigated. Grain diameter of thin films were increased and hygroscopic characteristics were good as discharge power. Hygroscopic characteristics of thin films heated for 15 min at 500$^{\circ}C$ were better and more linear than that at 400$^{\circ}C$ and were unchanged as Ar flow rate.

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