Fabrication and Characteristics of LB Ultra-thin Film Capacitor (I)

LB 초박막 커패시터의 제작 및 특성 (I)

  • 최용성 (동아대학교 공과대학 전기공학과) ;
  • 신훈규 (동아대학교 공과대학 전기공학과) ;
  • 권영수 (동아대학교 공과대학 전기공학과)
  • Published : 1995.11.01

Abstract

We had experiment using LB method that can fabricate molecular order ultra-thin film below 100${\AA}$. LB mettled has known as main technology of information society in 21C, because it is nut only free oriention and alignment of molecular but also ability of thickness control as molecular order. In this paper, the fabricated condition and physical properities of functional ultra-thin film of molecular order was investigated and highly efficient ultra-thin film capacitor was fabricated by using ultra-thin LB film for application as electronic device. Possibility of ultra-thin film capacitor was researched by analizing rind measuring electrical properties. Polyimide ultra-thin LB film capacitor was fabricated, ensured theoretically rind experimentally its possibility in range of 10Hz∼ 1MHz through its frequency characteristics.

Keywords