Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1995.05a
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- Pages.22-25
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- 1995
Electrical properties of ZnO/sapphire piezo-electric transducer by RF magnetron sputtering
RF magnetron sputtering으로 제작한 ZnO/sapphire 압전 변환기의 전기적인 특성에 관한 연구
Abstract
In this paper, the physical characteristics of piezoelectric transducer which generates acoustic weve at microwave frequency were theoretically analized. We found that increasing electrode thickness is showed large distorthion on bandwidth. ZnO thin film were desposited by RF magnetron sputtering method. considering the sputtering parameters. Thickness of the desposited ZnO was 3.9
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