한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 1995년도 추계학술대회 논문집
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- Pages.9-13
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- 1995
유리기판에 제작한 ZnO 박막의 c축 배향성에 관한 연구
A study on the c-axis orientation of ZnO thin film deposited on glass substrates
초록
In this paper, Zinc Oxide films, with a high degree of c-axis orientation, have been grown on glass substrates by a rf magnetron sputtering. The maximum crystal orientation was found to occur with substrate temperature 150
키워드