한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제9회 학술발표회 논문개요집
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- Pages.155-155
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- 1995
Sputtering Processes Studied by Medium Energy Ion Scattering Spectroscopy
- Moon, Dae-Won (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
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Kim, Hyun-Kyung
(Surface Analysis Groupp, Korea Research Institute of Standards and Science)
;
- Lee, Jae-Chul (Deppartment of Physics, Chungbuk University) ;
- Kang, Hee-Jae (Deppartment of Physics, Chungbuk University)
- 발행 : 1995.06.01