Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Sputtering Processes Studied by Medium Energy Ion Scattering Spectroscopy

  • Moon, Dae-Won (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
  • Kim, Hyun-Kyung (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
  • Lee, Jae-Chul (Deppartment of Physics, Chungbuk University) ;
  • Kang, Hee-Jae (Deppartment of Physics, Chungbuk University)
  • Published : 1995.06.01
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