Formation and Growth of Cu Nanocrystalite in Si(100) by Ion Implantation

  • Kim, H.K. (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
  • Kim, S.H. (Surface Analysis Groupp, Korea Research Institute of Standards and Science) ;
  • Moon, D.W. (Surface Analysis Groupp, Korea Research Institute of Standards and Science)
  • 발행 : 1995.06.01