한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제9회 학술발표회 논문개요집
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- Pages.141-141
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- 1995
Double layer $TiB_2$ -TiN Films
- LizhiChen (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- YunjieYang (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- ZhihongZheng (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- XiWang (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- XianghuaiLiu (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
- Han, J.G. (plasma Applied Materials Laboratory, Sung Kyun Kwan University) ;
- Yoon, J.S. (plasma Applied Materials Laboratory, Sung Kyun Kwan University)
- 발행 : 1995.06.01