Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Double layer $TiB_2$-TiN Films

  • LizhiChen (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
  • YunjieYang (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
  • ZhihongZheng (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
  • XiWang (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
  • XianghuaiLiu (Ion Beam Laboratory, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, Shanghai 200050, pp. R. China) ;
  • Han, J.G. (plasma Applied Materials Laboratory, Sung Kyun Kwan University) ;
  • Yoon, J.S. (plasma Applied Materials Laboratory, Sung Kyun Kwan University)
  • Published : 1995.06.01
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Abstract

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