한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제9회 학술발표회 논문개요집
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- Pages.88-88
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- 1995
Controls of Crystallinity and Surface Roughness of Cu film in ppartially Ionized Beam Deposition
- Kim, Ki-hwan (Division of Ceramics, Korea Institute) ;
- Koh, Seok-Keun (Division of Ceramics, Korea Institute) ;
- Choi, Won-Kook (Division of Ceramics, Korea Institute) ;
- Yoon, Young-Soo (Division of Ceramics, Korea Institute) ;
- Jung, Hyung-Jin (Division of Ceramics, Korea Institute)
- 발행 : 1995.06.01