한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)

한국진공학회 (The Korean Vacuum Society)
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Development of STp-301(C)/451(C) Turbomolecular Pump

  • Enomoto, Y. (SEIKO SEIKI Co., LTD) ;
  • Enosawa, H. (SEIKO SEIKI Co., LTD) ;
  • Takahashi, T. (SEIKO SEIKI Co., LTD)
  • 발행 : 1995.06.01
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초록

Seiko Seiki develops and munufactures magnetic Bearing type Turbomolecular Pumps (MB-TMP), Seiko shipped 14,000 MB-TMPs and holds the world's largest share in the MB-TMP field. It developed a new 300 (l/s) class turbomolecular pump.

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