Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
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- Pages.61-62
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- 1995
Development of STp-301(C)/451(C) Turbomolecular Pump
- Enomoto, Y. (SEIKO SEIKI Co., LTD) ;
- Enosawa, H. (SEIKO SEIKI Co., LTD) ;
- Takahashi, T. (SEIKO SEIKI Co., LTD)
- Published : 1995.06.01
Abstract
Seiko Seiki develops and munufactures magnetic Bearing type Turbomolecular Pumps (MB-TMP), Seiko shipped 14,000 MB-TMPs and holds the world's largest share in the MB-TMP field. It developed a new 300 (l/s) class turbomolecular pump.
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