Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.06a
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- Pages.46-46
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- 1995
Trench Isolation 공정시 발생하는 격자결함 관찰 및 제거 기술 연구
- Won, Dae-Hui (Sungkyunkwan University) ;
- Kim, Ji-Hyeong (Sungkyunkwan University) ;
- Jo, Yeong-A (Sungkyunkwan University) ;
- Lee, Ju-Uk (Korea Advanced Institute of Science and Technology) ;
- Lee, Jeong-Yong (Korea Advanced Institute of Science and Technology)
- Published : 1995.06.01
Abstract
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