한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 1995년도 제8회 학술발표회 논문개요집
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- Pages.090-91
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- 1995
In-situ UppS observation of epitaxial growth, etching and oxidation reactions on Si surfaces at high temperatures under a reactive gas atmosphere
- Takakuwa, Yuji (Research Institute for Scientific Measurements, Tohoku University)
- 발행 : 1995.02.01