Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.02a
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- Pages.090-91
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- 1995
In-situ UppS observation of epitaxial growth, etching and oxidation reactions on Si surfaces at high temperatures under a reactive gas atmosphere
- Takakuwa, Yuji (Research Institute for Scientific Measurements, Tohoku University)
- Published : 1995.02.01
Abstract
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