Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1995.02a
- /
- Pages.30-30
- /
- 1995
A study on the microstructure of SiGe films grown on Si substrate by MBE and SppE method
MBE와 SPE 방법으로 Si 기판위에 성장된 SiGe에피층의 미세구조 연구
-
Kim, Sang-Gi
(Electronics And Telecommunications Research Institute)
;
- Nam, San (Electronics And Telecommunications Research Institute) ;
-
Jo, Gyeong-Ik
(Electronics And Telecommunications Research Institute)
;
-
Yun, Seon-Jin
(Electronics And Telecommunications Research Institute)
;
- Baek, Jong-Tae (Electronics And Telecommunications Research Institute) ;
- Bae, In-Ho (Dept.of Physics, Yeungnam University)
-
김상기
(한국전자통신연구소 반도체연구단)
;
- 남산 (한국전자통신연구소 반도체연구단) ;
-
조경익
(한국전자통신연구소 반도체연구단)
;
-
윤선진
(한국전자통신연구소 반도체연구단)
;
- 백종태 (한국전자통신연구소 반도체연구단) ;
- 배인호 (영남대학교 물리학과)
- Published : 1995.02.01
Abstract
Keywords