원통형 커패시턴스 센서를 이용한 초정밀 공기 주축의 회전오차 측정

For measuring the error motion of ultra-precision spindle, eliminating the geometric errors is a must. Unless it is achieved, geometric errors will be dominant in data. Here, the roundness error and alignment error between spindle and sensor are to be removed. That's because typical error range of such spindle is muchless than geometric one. A capacitive transducer of cylidricalshape was developed, which takes full advantage of the spatial-averaging effect by using large area compared tpo the geometric error. This idea was first proposed by Chapman and here it is modified for better performance with nomical gap of 50 .mu. m and with newly designed guards which encompass the respective sensor to rectify the electrical field distribution in good shape. The measurement system is made to get the orbit of Ultra-Precision Air Spindle which is supposed to have its runout under 1 .mu. m. The Calibration data of this sensor is presented and the spindle orbit from 2000rpm to 5500rpm is showed. It is quite reasonable to use this sensor in the range of 60 .mu. m with an accuracy of several tens of nm.