운모박판(雲母薄板)/강유전체소구(强誘電體小球) 복합장벽방전(複合障壁放電)의 플라즈마발생특성

Plasma Generation of Ferroelectric Ball/Mica Sheet Double Barrier Discharge

Basic discharge characteristics of a ferroelectric ball and mica sheet double barrier have been studied for learning the fundamentals of the barrier discharges and for checking the potential to be used as a plasma generator. It is found that plasma generation of the plasma generator was influenced greatly by the dielectric constant of the ferroelectric ball barrier and applied power frequency. As a result, there are optimum conditions of the dielectric constant as a barrier and the applied frequency to generate ozone effectively, which were ${\varepsilon}_r$=600 and f=4 kHz at the present experimental case.