Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1995.07c
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- Pages.1245-1247
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- 1995
A Study on Structure and Acoustic Properties of ZnO transducer by RF Magnetron Sputter
RF Magnetron Sputter로 증착한 ZnO 압전변환기의 구조 및 음향특성에 관한 연구
- Lee, Jong-Duk (Dept. of Elec. Eng., Sung Kyun Kwan Univ.) ;
- Ko, Sang-Choon (Dept. of Elec. Eng., Sung Kyun Kwan Univ.) ;
- Song, Joon-Tae (Dept. of Elec. Eng., Sung Kyun Kwan Univ.)
- Published : 1995.07.20
Abstract
In this paper, Analyzed structual property using SEM and XRD. The longer distance between substrate and target enhance crystalographic orientation of (110)plane, but inhibit growth of (002)plane. Also, deposited ZnO thin film on electrode layer inhibit crystalographic orientation of (002)plane, expecially Al electrode inhibit stronger than Pt layer. And using fabricated transducer, analyzed eletric and frequency characteristics.
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