대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1995년도 하계학술대회 논문집 C
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- Pages.1181-1183
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- 1995
비정질 실리콘의 재결정화에 따른 표면기복의 변화에 관한 연구
A Study on the Variation of Surface Roughness of a-Si According to Recrystallization
- Park, Jae-Hong (Department of Electronic Engineering, Seoul City University) ;
- Chung, Chong-Won (Department of Electronic Engineering, Seoul City University) ;
- Kim, Chul-Ju (Department of Electronic Engineering, Seoul City University)
- 발행 : 1995.07.20
초록
In this study, we observed the surface morphology of amorphous silicon annealed at
키워드